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US08539836B2 MEMS sensor with dual proof masses 有权
具有双重质量的MEMS传感器

MEMS sensor with dual proof masses
Abstract:
A microelectromechanical systems (MEMS) sensor (20) includes a substrate (26) and suspension anchors (34, 36) formed on a planar surface (28) of the substrate (26). The MEMS sensor (20) further includes a first movable element (38) and a second movable element (40) suspended above the substrate (26). Compliant members (42, 44) interconnect the first movable element (38) with the suspension anchor 34 and compliant members (46, 48) interconnect the second movable element (40) with the suspension anchor (36). The movable elements (38, 40) have an equivalent shape. The movable elements may be generally rectangular movable elements (38, 40) or L-shaped movable elements (108, 110) in a nested configuration. The movable elements (38, 40) are oriented relative to one another in rotational symmetry about a point location (94) on the substrate (26).
Abstract(Chinese):

微机电系统（MEMS）传感器（20）包括衬底（26）和形成在衬底（26）的平坦表面（28）上的悬挂锚固件（34,36）。 MEMS传感器（20）还包括悬挂在衬底（26）上方的第一可移动元件（38）和第二可移动元件（40）。 第一可移动元件（38）与悬挂锚固件34相互连接的合规构件（42,44）以及将第二可移动元件（40）与悬挂锚固件（36）相互连接的顺应构件（46,48）。 可移动元件（38,40）具有等效的形状。 可移动元件可以是嵌套构造的大致为矩形的可移动元件（38,40）或L形可移动元件（108,110）。 可移动元件（38,40）相对于彼此以关于基底（26）上的点位置（94）的旋转对称的方式定向。

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