Invention Grant
- Patent Title: Apparatus and method for plating substrate
- Patent Title (中): 电镀基板的设备及方法
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Application No.: US12656683Application Date: 2010-02-12
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Publication No.: US08540854B2Publication Date: 2013-09-24
- Inventor: Yijung Kim , Eun Su Rho , Jeong Yong Bae
- Applicant: Yijung Kim , Eun Su Rho , Jeong Yong Bae
- Applicant Address: KR Chungcheongnam
- Assignee: Semes Co., Ltd.
- Current Assignee: Semes Co., Ltd.
- Current Assignee Address: KR Chungcheongnam
- Agency: Harness, Dickey & Pierce P.L.C.
- Priority: KR10-2009-0011126 20090211
- Main IPC: C25D5/08
- IPC: C25D5/08 ; C25D7/12 ; C25D11/32

Abstract:
Provided are a substrate plating apparatus and a substrate plating method. In the substrate plating apparatus, a substrate support member supports a substrate to allow a plating surface to look up. A plating solution containing positive ions dissolved from a positive electrode is supplied from a plating solution supply member onto the substrate at an upper side of the substrate support member. A plating bath surrounds the substrate support member. The substrate support member is rotated in a state where it is immersed into the plating solution and an additive. The substrate can be supported by the substrate support member without reversing the substrate. Also, a pattern defect due to bubbles generated during a plating process can be prevented.
Public/Granted literature
- US20100200397A1 Apparatus and method for plating substrate Public/Granted day:2010-08-12
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