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US08541253B2 III-nitride semiconductor laser device, and method of fabricating the III-nitride semiconductor laser device 失效
III族氮化物半导体激光器件以及III族氮化物半导体激光器件的制造方法

III-nitride semiconductor laser device, and method of fabricating the III-nitride semiconductor laser device
Abstract:
A method of fabricating a III-nitride semiconductor laser device includes: preparing a substrate with a semipolar primary surface, the semipolar primary surface including a hexagonal III-nitride semiconductor; forming a substrate product having a laser structure, an anode electrode, and a cathode electrode, the laser structure including a substrate and a semiconductor region, and the semiconductor region being formed on the semipolar primary surface; after forming the substrate product, forming first and second end faces; and forming first and second dielectric multilayer films for an optical cavity of the nitride semiconductor laser device on the first and second end faces, respectively.
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