Invention Grant
US08541253B2 III-nitride semiconductor laser device, and method of fabricating the III-nitride semiconductor laser device
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III族氮化物半导体激光器件以及III族氮化物半导体激光器件的制造方法
- Patent Title: III-nitride semiconductor laser device, and method of fabricating the III-nitride semiconductor laser device
- Patent Title (中): III族氮化物半导体激光器件以及III族氮化物半导体激光器件的制造方法
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Application No.: US13416844Application Date: 2012-03-09
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Publication No.: US08541253B2Publication Date: 2013-09-24
- Inventor: Yusuke Yoshizumi , Yohei Enya , Takashi Kyono , Masahiro Adachi , Shinji Tokuyama , Takamichi Sumitomo , Masaki Ueno , Takatoshi Ikegami , Koji Katayama , Takao Nakamura
- Applicant: Yusuke Yoshizumi , Yohei Enya , Takashi Kyono , Masahiro Adachi , Shinji Tokuyama , Takamichi Sumitomo , Masaki Ueno , Takatoshi Ikegami , Koji Katayama , Takao Nakamura
- Applicant Address: JP Osaka-shi
- Assignee: Sumitomo Electric Industries, Ltd.
- Current Assignee: Sumitomo Electric Industries, Ltd.
- Current Assignee Address: JP Osaka-shi
- Agency: Venable LLP
- Agent Michael A. Sartori; Tamatane J. Aga
- Priority: JP2009-228747 20090930
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
A method of fabricating a III-nitride semiconductor laser device includes: preparing a substrate with a semipolar primary surface, the semipolar primary surface including a hexagonal III-nitride semiconductor; forming a substrate product having a laser structure, an anode electrode, and a cathode electrode, the laser structure including a substrate and a semiconductor region, and the semiconductor region being formed on the semipolar primary surface; after forming the substrate product, forming first and second end faces; and forming first and second dielectric multilayer films for an optical cavity of the nitride semiconductor laser device on the first and second end faces, respectively.
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