Invention Grant
- Patent Title: Native devices having improved device characteristics and methods for fabrication
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Application No.: US12770191Application Date: 2010-04-29
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Publication No.: US08541269B2Publication Date: 2013-09-24
- Inventor: Shashank S. Ekbote , Rongtian Zhang
- Applicant: Shashank S. Ekbote , Rongtian Zhang
- Applicant Address: US CA San Diego
- Assignee: QUALCOMM Incorporated
- Current Assignee: QUALCOMM Incorporated
- Current Assignee Address: US CA San Diego
- Agent Sam Talpalatsky; Nicholas J. Pauley; Joseph Agusta
- Main IPC: H01L21/336
- IPC: H01L21/336 ; H01L21/337

Abstract:
A method for fabricating a native device is presented. The method includes forming a gate structure over a substrate starting at an outer edge of an inner marker region, where the gate structure extends in a longitudinal direction, and performing MDD implants, where each implant is performed using a different orientation with respect to the gate structure, performing pocket implants, where each implant is performed using a different orientation with respect to the gate structure, and concentrations of the pocket implants vary based upon the orientations. A transistor fabricated as a native device, is presented, which includes an inner marker region, an active outer region which surrounds the inner marker region, a gate structure coupled to the inner marker region, and first and second source/drain implants located within the active outer region and interposed between the first source/drain implant and the second source/drain implant.
Public/Granted literature
- US20110266635A1 Native Devices Having Improved Device Characteristics and Methods for Fabrication Public/Granted day:2011-11-03
Information query
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