Invention Grant
- Patent Title: Thermo-compression bonded electrical interconnect structure and method
- Patent Title (中): 热压接电气互连结构及方法
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Application No.: US13159773Application Date: 2011-06-14
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Publication No.: US08541291B2Publication Date: 2013-09-24
- Inventor: Bruce K. Furman , Jae-Woong Nah
- Applicant: Bruce K. Furman , Jae-Woong Nah
- Applicant Address: US CA San Jose
- Assignee: Ultratech, Inc.
- Current Assignee: Ultratech, Inc.
- Current Assignee Address: US CA San Jose
- Agency: Peters Verny, LLP
- Agent Allston L. Jones
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L21/44

Abstract:
An electrical structure and method for forming electrical interconnects. The method includes positioning a sacrificial carrier substrate such that a first surface of a non-solder metallic core structure within the sacrificial carrier substrate is in contact with a first electrically conductive pad. The first surface is thermo-compression bonded to the first electrically conductive pad. The sacrificial carrier substrate is removed from the non-solder metallic core structure. A solder structure is formed on a second electrically conductive pad. The first substrate comprising the non-solder metallic core structure is positioned such that a second surface of the non-solder metallic core structure is in contact with the solder structure. The solder structure is heated to a temperature sufficient to cause the solder structure to melt and form an electrical and mechanical connection between the second surface of the non-solder metallic core structure and the second electrically conductive pad.
Public/Granted literature
- US20110239458A1 THERMO-COMPRESSION BONDED ELECTRICAL INTERCONNECT STRUCTURE AND METHOD Public/Granted day:2011-10-06
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