Invention Grant
US08541606B2 Tertiary alcohol derivative, polymer compound and photoresist composition
有权
叔醇衍生物,高分子化合物和光致抗蚀剂组合物
- Patent Title: Tertiary alcohol derivative, polymer compound and photoresist composition
- Patent Title (中): 叔醇衍生物,高分子化合物和光致抗蚀剂组合物
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Application No.: US13328730Application Date: 2011-12-16
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Publication No.: US08541606B2Publication Date: 2013-09-24
- Inventor: Takashi Fukumoto , Ichihiro Aratani
- Applicant: Takashi Fukumoto , Ichihiro Aratani
- Applicant Address: JP Kurashiki-shi
- Assignee: Kuraray Co., Ltd.
- Current Assignee: Kuraray Co., Ltd.
- Current Assignee Address: JP Kurashiki-shi
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2006041402 20060217
- Main IPC: C07D307/26
- IPC: C07D307/26

Abstract:
A polymer compound for a photoresist composition (a) having a high dissolution rate in a developing solution after exposure and (b) exhibiting little swelling during development. A tertiary alcohol derivative that is a raw material for the polymer compound. A tertiary alcohol that is an intermediate of the tertiary alcohol derivative. The tertiary alcohol is represented by formula (3): wherein R1 and R2 individually represent a linear, branched or cyclic alkylene group having 2 to 9 carbon atoms, which may contain an oxygen atom, and wherein R1 and R2 may together form a ring with a carbon atom to which R1 and R2 are bonded.
Public/Granted literature
- US20120149921A1 TERTIARY ALCOHOL DERIVATIVE, POLYMER COMPOUND AND PHOTORESIST COMPOSITION Public/Granted day:2012-06-14
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