Invention Grant
- Patent Title: Inlaid optical material and method of manufacture
- Patent Title (中): 镶嵌光学材料及其制造方法
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Application No.: US12662237Application Date: 2010-04-07
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Publication No.: US08541735B2Publication Date: 2013-09-24
- Inventor: John S. Foster , John C. Harley , Ian R. Johnston , Jeffery F. Summers
- Applicant: John S. Foster , John C. Harley , Ian R. Johnston , Jeffery F. Summers
- Applicant Address: US CA Goleta
- Assignee: Innovative Micro Technology
- Current Assignee: Innovative Micro Technology
- Current Assignee Address: US CA Goleta
- Agent Jaquelin K. Spong
- Main IPC: H01L21/00
- IPC: H01L21/00 ; B29D11/00 ; H01J3/14 ; G01N21/00 ; G01N15/06
Abstract:
An optical material is inlaid into a supporting substrate, with the top surface of the optical material flush with the top surface of the substrate, wherein the optical element is used to shape a beam of light travelling substantially parallel to the top surface of the substrate, but with the central axis of the beam below the top surface of the substrate. The optical elements serve to shape the beam of light for delivery to or from a microfabricated structure within the device.
Public/Granted literature
- US20110250092A1 Inlaid optical material and method of manufacture Public/Granted day:2011-10-13
Information query
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