Invention Grant
- Patent Title: Bolometer-type THz wave detector
- Patent Title (中): 分光光度计型太赫兹波检测器
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Application No.: US13422120Application Date: 2012-03-16
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Publication No.: US08541742B2Publication Date: 2013-09-24
- Inventor: Seiji Kurashina , Masaru Miyoshi
- Applicant: Seiji Kurashina , Masaru Miyoshi
- Applicant Address: JP Tokyo
- Assignee: NEC Corporation
- Current Assignee: NEC Corporation
- Current Assignee Address: JP Tokyo
- Priority: JP2011-058693 20110317
- Main IPC: G01J5/20
- IPC: G01J5/20

Abstract:
The bolometer-type THz wave detector according to the present invention has a thermal isolation structure in which a temperature detecting portion including a bolometer thin film connected to electrical wirings is supported in a state of being raised from the substrate by a supporting portion including the electrical wirings connected to a Read-out integrated circuit formed in a substrate, and the detector comprises a reflective film formed on the substrate, an absorbing film formed on the front surface or back surface or at an inner position in the temperature detecting portion , whereby an optical resonant structure is formed by the reflective film and the absorbing film, and a dielectric film formed on the reflective film. The dielectric film thickness f is set so that air gap between an upper surface of the dielectric film and a lower surface of the temperature detecting portion is smaller than 8 μm.
Public/Granted literature
- US20120235045A1 BOLOMETER-TYPE THz WAVE DETECTOR Public/Granted day:2012-09-20
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