Invention Grant
- Patent Title: Noise shielding techniques for ultra low current measurements in biochemical applications
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Application No.: US13396522Application Date: 2012-02-14
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Publication No.: US08541849B2Publication Date: 2013-09-24
- Inventor: Roger Chen
- Applicant: Roger Chen
- Applicant Address: US CA Mountain View
- Assignee: Genia Technologies, Inc.
- Current Assignee: Genia Technologies, Inc.
- Current Assignee Address: US CA Mountain View
- Agency: Van Pelt, Yi & James LLP
- Main IPC: H01L27/14
- IPC: H01L27/14

Abstract:
A device having an integrated noise shield is disclosed. The device includes a plurality of vertical shielding structures substantially surrounding a semiconductor device. The device further includes an opening above the semiconductor device substantially filled with a conductive fluid, wherein the plurality of vertical shielding structures and the conductive fluid shield the semiconductor device from ambient radiation. In some embodiments, the device further includes a conductive bottom shield below the semiconductor device shielding the semiconductor device from ambient radiation. In some embodiments, the opening is configured to allow a biological sample to be introduced into the semiconductor device. In some embodiments, the vertical shielding structures comprise a plurality of vias, wherein each of the plurality of vias connects more than one conductive layers together. In some embodiments, the device comprises a nanopore device, and wherein the nanopore device comprises a single cell of a nanopore array.
Public/Granted literature
- US20130207205A1 NOISE SHIELDING TECHNIQUES FOR ULTRA LOW CURRENT MEASUREMENTS IN BIOCHEMICAL APPLICATIONS Public/Granted day:2013-08-15
Information query
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