Invention Grant
US08541850B2 Method and system for forming resonators over CMOS 有权
用于在CMOS上形成谐振器的方法和系统

Method and system for forming resonators over CMOS
Abstract:
In accordance with one embodiment of the present disclosure, a semiconductor substrate includes complementary metal-oxide-semiconductor (CMOS) circuitry disposed outwardly from the semiconductor substrate. An electrode is disposed outwardly from the CMOS circuitry. The electrode is electrically coupled to the CMOS circuitry. A resonator is disposed outwardly from the electrode. The resonator is operable to oscillate at a resonance frequency in response to an electrostatic field propagated, at least in part, by the electrode.
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