Invention Grant
- Patent Title: MEMS package
- Patent Title (中): MEMS封装
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Application No.: US12678930Application Date: 2008-09-16
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Publication No.: US08541851B2Publication Date: 2013-09-24
- Inventor: Toan K. Ly , Jason P. Goodelle
- Applicant: Toan K. Ly , Jason P. Goodelle
- Agency: Kenyon & Kenyon LLP
- International Application: PCT/US2008/010763 WO 20080916
- International Announcement: WO2009/038692 WO 20090326
- Main IPC: H01L23/00
- IPC: H01L23/00

Abstract:
An apparatus and method for manufacturing a micro-electrical mechanical system (MEMS) package comprising a first molded body having a first acoustic port, a second molded body connected to the first molded body, a leadframe at least partially integral with at least one of the first and second molded bodies, a die cavity provided on at least one of the first and second molded bodies and having a second acoustic port, a MEMS die provided on the die cavity, a channel connecting the first and second acoustic ports, the first molded body sealing at least a portion of the channel, and a lid attached to the second molded body and sealing at least a portion of the die cavity.
Public/Granted literature
- US20100295139A1 MEMS PACKAGE Public/Granted day:2010-11-25
Information query
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