Invention Grant
US08541867B2 Metal insulator metal structure with remote oxygen scavenging 失效
金属绝缘子金属结构,远程除氧

Metal insulator metal structure with remote oxygen scavenging
Abstract:
A structure includes a first metallic electrode, a dielectric film formed over the first metallic electrode, and a second metallic electrode formed over the dielectric film. The second metallic electrode includes an oxygen scavenging material. The oxygen scavenging material is selected such that an oxygen density decreases in a region between the first metallic electrode and the second metallic electrode responsive to elevating a temperature of the first metallic electrode, the dielectric film, and the second metallic electrode.
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