Invention Grant
- Patent Title: Metal insulator metal structure with remote oxygen scavenging
- Patent Title (中): 金属绝缘子金属结构,远程除氧
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Application No.: US13171044Application Date: 2011-06-28
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Publication No.: US08541867B2Publication Date: 2013-09-24
- Inventor: Martin M. Frank
- Applicant: Martin M. Frank
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Cantor Colburn LLP
- Agent Vazken Alexanian
- Main IPC: H01L21/02
- IPC: H01L21/02 ; H01L21/20

Abstract:
A structure includes a first metallic electrode, a dielectric film formed over the first metallic electrode, and a second metallic electrode formed over the dielectric film. The second metallic electrode includes an oxygen scavenging material. The oxygen scavenging material is selected such that an oxygen density decreases in a region between the first metallic electrode and the second metallic electrode responsive to elevating a temperature of the first metallic electrode, the dielectric film, and the second metallic electrode.
Public/Granted literature
- US20130001743A1 METAL INSULATOR METAL STRUCTURE WITH REMOTE OXYGEN SCAVENGING Public/Granted day:2013-01-03
Information query
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