Invention Grant
- Patent Title: Semiconductor device having shielded conductive vias
- Patent Title (中): 具有屏蔽导电通孔的半导体器件
-
Application No.: US13306762Application Date: 2011-11-29
-
Publication No.: US08541883B2Publication Date: 2013-09-24
- Inventor: Hung-Hsiang Cheng , Tzu-Chih Lin , Chang-Ying Hung , Chih-Wei Wu
- Applicant: Hung-Hsiang Cheng , Tzu-Chih Lin , Chang-Ying Hung , Chih-Wei Wu
- Applicant Address: TW
- Assignee: Advanced Semiconductor Engineering, Inc.
- Current Assignee: Advanced Semiconductor Engineering, Inc.
- Current Assignee Address: TW
- Agency: Morgan Law Offices, PLC
- Main IPC: H01L29/40
- IPC: H01L29/40

Abstract:
The present invention relates to a semiconductor device having a shielding layer. The semiconductor device includes a substrate, an inner metal layer, a shielding layer, an insulation material, a metal layer, a passivation layer and a redistribution layer. The inner metal layer is disposed in a through hole of the substrate. The shielding layer surrounds the inner annular metal. The insulation material is disposed between the inner metal layer and the shielding layer. The metal layer is disposed on a surface of the substrate, contacts the shielding layer and does not contact the inner metal layer. The redistribution layer is disposed in an opening of the passivation layer so as to contact the inner metal layer.
Public/Granted literature
- US20130134601A1 SEMICONDUCTOR DEVICE HAVING SHIELDED CONDUCTIVE VIAS AND METHOD FOR MANUFACTURING THE SAME Public/Granted day:2013-05-30
Information query
IPC分类: