A nano/micro electro-mechanical relay, comprising an at least one normally open (NO) nano/micro relay switch and an at least one normally closed (NC) nano/micro relay switch. Both the NC nano/micro relay switch and the NO nano/micro relay switch can be switched between their respective normal relay switch positions and their respective actuated relay switch positions. An at least one nano/micro actuator including an at least one piezoelectric stack layer being attached to an at least one elastic layer, wherein the at least one piezoelectric stack layer contracts to deflect the at least one elastic layer, and thereby actuate the at least one nano/micro contact bar to simultaneously switch the NC nano/micro relay switch and the NO nano/micro relay switch between their respective normal relay switch position and their respective actuated relay switch positions.