Invention Grant
US08541944B2 Display apparatus using oxide semiconductor and production thereof
有权
使用氧化物半导体的显示装置及其制造
- Patent Title: Display apparatus using oxide semiconductor and production thereof
- Patent Title (中): 使用氧化物半导体的显示装置及其制造
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Application No.: US13417483Application Date: 2012-03-12
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Publication No.: US08541944B2Publication Date: 2013-09-24
- Inventor: Masafumi Sano , Kenji Takahashi
- Applicant: Masafumi Sano , Kenji Takahashi
- Applicant Address: JP Tokyo
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Fitzpatrick, Cella, Harper & Scinto
- Priority: JP2006-328307 20061205
- Main IPC: H01L51/50
- IPC: H01L51/50 ; H01L51/52 ; H01L51/54

Abstract:
A transistor includes a source terminal and a drain terminal, an active layer having an oxide containing In, a gate electrode, and a gate insulating layer between the gate electrode and the active layer. The gate insulating layer contains hydrogen in an amount of less than 3×1021 atoms/cm3, and an electron carrier concentration of the active layer is less than 1018/cm3.
Public/Granted literature
- US20120168749A1 DISPLAY APPARATUS USING OXIDE SEMICONDUCTOR AND PRODUCTION THEREOF Public/Granted day:2012-07-05
Information query
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