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US08541944B2 Display apparatus using oxide semiconductor and production thereof 有权
使用氧化物半导体的显示装置及其制造

Display apparatus using oxide semiconductor and production thereof
Abstract:
A transistor includes a source terminal and a drain terminal, an active layer having an oxide containing In, a gate electrode, and a gate insulating layer between the gate electrode and the active layer. The gate insulating layer contains hydrogen in an amount of less than 3×1021 atoms/cm3, and an electron carrier concentration of the active layer is less than 1018/cm3.
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