Invention Grant
- Patent Title: Method and device for scanning-microscopy imaging of a specimen
- Patent Title (中): 样本扫描显微镜成像的方法和装置
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Application No.: US13347756Application Date: 2012-01-11
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Publication No.: US08542439B2Publication Date: 2013-09-24
- Inventor: Holger Birk , Bernd Widzgowski , Holger Nissle
- Applicant: Holger Birk , Bernd Widzgowski , Holger Nissle
- Applicant Address: DE Wetzlar
- Assignee: Leica Microsystems CMS GmbH
- Current Assignee: Leica Microsystems CMS GmbH
- Current Assignee Address: DE Wetzlar
- Agency: Patentbar International P.C.
- Priority: DE102011000090 20110111
- Main IPC: G02B21/06
- IPC: G02B21/06 ; G02B26/02 ; H01L21/268

Abstract:
A method and a device for scanning-microscopy imaging of a specimen (28) are described. Provision is made that a plurality of specimen points are scanned by means of a scanning beam (14) in successive scanning time intervals, the intensity of the radiation emitted from the respectively scanned specimen point is repeatedly sensed within the associated scanning time interval, an intensity mean value is determined, as a mean value image point signal, from the intensities sensed in the respectively scanned specimen point, and the mean value image point signals are assembled into a mean value raster image. Provision is further made for additionally determining an intensity variance value, as a variance image point signal, from the intensities sensed in the respectively scanning specimen points, and for assembling the variance image point signals into a variance raster image signal.
Public/Granted literature
- US20120175505A1 Method and Device for Scanning-Microscopy Imaging of a Specimen Public/Granted day:2012-07-12
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