Invention Grant
- Patent Title: Acoustic sensor and microphone
- Patent Title (中): 声传感器和麦克风
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Application No.: US13105440Application Date: 2011-05-11
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Publication No.: US08542851B2Publication Date: 2013-09-24
- Inventor: Takashi Kasai
- Applicant: Takashi Kasai
- Applicant Address: JP Kyoto
- Assignee: OMRON Corporation
- Current Assignee: OMRON Corporation
- Current Assignee Address: JP Kyoto
- Agency: Osha Liang LLP
- Priority: JP2010-110945 20100513; JP2011-074454 20110330
- Main IPC: H04R25/00
- IPC: H04R25/00

Abstract:
An acoustic sensor includes a semiconductor substrate with a back chamber, a conductive diaphragm arranged on an upper side of the semiconductor substrate, an insulating fixed film fixed on an upper surface of the semiconductor substrate covering the conductive diaphragm with a gap, a conductive fixed electrode film arranged on the insulating fixed film facing the diaphragm, an extraction wiring extracted from the conductive fixed electrode film, and an electrode pad to which the extraction wiring is connected. The acoustic sensor converts an acoustic vibration to change electrostatic capacitance between the conductive diaphragm and the conductive fixed electrode film. A plurality of acoustic perforations are opened in a back plate including the insulating fixed film and the conductive fixed electrode film. An opening rate of the plurality of acoustic perforations is smaller in the extraction wiring and a region in the vicinity thereof than in other regions.
Public/Granted literature
- US20110280419A1 ACOUSTIC SENSOR AND MICROPHONE Public/Granted day:2011-11-17
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