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US08542852B2 Electro-mechanical transducer, an electro-mechanical converter, and manufacturing methods of the same 有权
机电换能器，机电转换器及其制造方法

Electro-mechanical transducer, an electro-mechanical converter, and manufacturing methods of the same
Abstract:
An electro-mechanical transducer contains a vibrating electrode (15b), a vibrating-electrode-insulating film (15a) disposed at a bottom surface of the vibrating electrode (15b), an electret layer (13) facing to the vibrating electrode (15b), an electret-insulating layer (14e) joined to a top surface of the electret layer (13), and a back electrode 17 in contact with a bottom surface of the electret layer (13). A microgap between ten nanometers and 100 micrometers is established between the vibrating-electrode-insulating film (15a) and electret-insulating layer (14e). A central line average roughness Ra of the vibrating electrode (15b), including a bending, is 1/10 or less of a gap width measured between the bottom surface of the vibrating electrode (15b) and the top surface of the electret layer (13).
Abstract(Chinese):

机电换能器包括振动电极（15b），设置在振动电极（15b）底面的振动电极绝缘膜（15a），与振动电极（15b）相对的驻极体层（13） 接合到驻极体层（13）的上表面的驻极体绝缘层（14e）和与所述驻极体层（13）的底面接触的背面电极17。 在振动电极绝缘膜（15a）和驻极体绝缘层（14e）之间建立了10纳米到100微米之间的微隙。 包括弯曲的振动电极（15b）的中心线平均粗糙度Ra是在振动电极（15b）的底表面和驻极体层（13）的顶表面之间测量的间隙宽度的1/10或更小 ）。

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