Invention Grant
US08544157B2 Method for producing a liquid transport apparatus 有权
液体输送装置的制造方法

Method for producing a liquid transport apparatus
Abstract:
A method for producing a liquid transport apparatus includes forming a recess, on a surface of a vibration plate on a side not facing the pressure chamber, in one of areas which are defined by dividing an area overlapping with a pressure chamber in a predetermined direction; forming a piezoelectric layer by depositing particles of a piezoelectric material on the surface of the vibration plate on which the recess is formed so that a thickness of a portion of the piezoelectric layer corresponding to the area formed with the recess is thinner than a thickness of a portion corresponding to an area not formed with the recess; and forming a first electrode, on a surface of the piezoelectric layer on a side not facing the vibration plate, in an area overlapping with the pressure chamber and corresponding to the area of the vibration plate not formed with the recess.
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