Invention Grant
- Patent Title: Method for producing a liquid transport apparatus
- Patent Title (中): 液体输送装置的制造方法
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Application No.: US12027956Application Date: 2008-02-07
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Publication No.: US08544157B2Publication Date: 2013-10-01
- Inventor: Hiroto Sugahara , Yasuhiro Sekiguchi
- Applicant: Hiroto Sugahara , Yasuhiro Sekiguchi
- Applicant Address: JP Nagoya-shi, Aichi-ken
- Assignee: Brother Kogyo Kabushiki Kaisha
- Current Assignee: Brother Kogyo Kabushiki Kaisha
- Current Assignee Address: JP Nagoya-shi, Aichi-ken
- Agency: Baker Botts L.L.P.
- Priority: JP2007-027661 20070207
- Main IPC: B21D53/76
- IPC: B21D53/76 ; H05K3/10

Abstract:
A method for producing a liquid transport apparatus includes forming a recess, on a surface of a vibration plate on a side not facing the pressure chamber, in one of areas which are defined by dividing an area overlapping with a pressure chamber in a predetermined direction; forming a piezoelectric layer by depositing particles of a piezoelectric material on the surface of the vibration plate on which the recess is formed so that a thickness of a portion of the piezoelectric layer corresponding to the area formed with the recess is thinner than a thickness of a portion corresponding to an area not formed with the recess; and forming a first electrode, on a surface of the piezoelectric layer on a side not facing the vibration plate, in an area overlapping with the pressure chamber and corresponding to the area of the vibration plate not formed with the recess.
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