Invention Grant
US08544325B2 Capacitive displacement transducer for a weak-motion inertial sensor
有权
用于弱运动惯性传感器的电容位移传感器
- Patent Title: Capacitive displacement transducer for a weak-motion inertial sensor
- Patent Title (中): 用于弱运动惯性传感器的电容位移传感器
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Application No.: US12709429Application Date: 2010-02-19
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Publication No.: US08544325B2Publication Date: 2013-10-01
- Inventor: Nicholas Jason Ackerley , Timothy Philip Setterfield , Mark Jonathan Brice Hayman
- Applicant: Nicholas Jason Ackerley , Timothy Philip Setterfield , Mark Jonathan Brice Hayman
- Applicant Address: CA Kanata, Ontario
- Assignee: Nanometrics Inc.
- Current Assignee: Nanometrics Inc.
- Current Assignee Address: CA Kanata, Ontario
- Priority: CA2658141 20090306
- Main IPC: G01P15/00
- IPC: G01P15/00 ; G01P15/125

Abstract:
A broadband weak-motion inertial sensor includes a frame, a movable inertial mass, a forcing transducer for keeping the inertial mass stationary relative to the frame during operation, and a flexure for suspending the movable mass in the frame. Two or more closely spaced, substantially parallel capacitor plates, at least one attached to the frame, and one attached to the movable inertial mass, form a capacitive displacement transducer. The capacitor plates have a plurality of apertures with dimensions and arrangement chosen to simultaneously minimize damping induced thermal noise and give a high spatial efficiency. In an implementation, three capacitor plates are provided. The capacitor plates each have a same hexagonal pattern of circular holes; the holes are aligned on all included capacitor plates. Radius and spacing of the holes are dictated by a relationship that determines the minimum damping per unit capacitively effective area for a desired spatial efficiency, gap height and capacitor plate thickness. In an implementation, the capacitor plates are made of a printed circuit board material which, through etching of the thin conductive layer, can be mounted directly to a conductive frame and conductive inertial mass without the use of non-conductive spacers.
Public/Granted literature
- US20100223998A1 CAPACITIVE DISPLACEMENT TRANSDUCER Public/Granted day:2010-09-09
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