Invention Grant
- Patent Title: Method for manufacturing oxide semiconductor device
- Patent Title (中): 氧化物半导体器件的制造方法
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Application No.: US12846534Application Date: 2010-07-29
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Publication No.: US08546180B2Publication Date: 2013-10-01
- Inventor: Shunpei Yamazaki , Hiroki Ohara , Toshinari Sasaki , Kosei Noda , Hideaki Kuwabara
- Applicant: Shunpei Yamazaki , Hiroki Ohara , Toshinari Sasaki , Kosei Noda , Hideaki Kuwabara
- Applicant Address: JP Atsugi-shi, Kanagawa-ken
- Assignee: Semiconductor Energy Laboratory Co., Ltd.
- Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
- Current Assignee Address: JP Atsugi-shi, Kanagawa-ken
- Agency: Fish & Richardson P.C.
- Priority: JP2009-179773 20090731
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
An object is to provide a semiconductor device having a structure with which parasitic capacitance between wirings can be sufficiently reduced. An oxide insulating layer serving as a channel protective layer is formed over part of an oxide semiconductor layer overlapping with a gate electrode layer. In the same step as formation of the oxide insulating layer, an oxide insulating layer covering a peripheral portion of the oxide semiconductor layer is formed. The oxide insulating layer which covers the peripheral portion of the oxide semiconductor layer is provided to increase the distance between the gate electrode layer and a wiring layer formed above or in the periphery of the gate electrode layer, whereby parasitic capacitance is reduced.
Public/Granted literature
- US20110024750A1 SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME Public/Granted day:2011-02-03
Information query
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