Invention Grant
US08546224B2 Method for manufacturing twin bit structure cell with aluminum oxide layer
有权
具有氧化铝层的双位结构单元的制造方法
- Patent Title: Method for manufacturing twin bit structure cell with aluminum oxide layer
- Patent Title (中): 具有氧化铝层的双位结构单元的制造方法
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Application No.: US12965808Application Date: 2010-12-10
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Publication No.: US08546224B2Publication Date: 2013-10-01
- Inventor: Mieno Fumitake
- Applicant: Mieno Fumitake
- Applicant Address: CN Shanghai CN Beijing
- Assignee: Semiconductor Manufacturing International (Shanghai) Corporation,Semiconductor Manufacturing International (Beijing) Corporation
- Current Assignee: Semiconductor Manufacturing International (Shanghai) Corporation,Semiconductor Manufacturing International (Beijing) Corporation
- Current Assignee Address: CN Shanghai CN Beijing
- Agency: Kilpatrick Townsend & Stockton LLP
- Priority: CN200910201181 20091215
- Main IPC: H01L21/336
- IPC: H01L21/336 ; H01L29/792

Abstract:
A method for manufacturing a twin bit cell structure with an aluminum oxide material includes forming a gate dielectric layer overlying a semiconductor substrate and a polysilicon gate structure overlying the gate dielectric layer. An undercut region is formed in each side of the gate dielectric layer underneath the polysilicon gate structure. Thereafter, an oxidation process is performed to form a first silicon oxide layer on a peripheral surface of the polysilicon gate structure and a second silicon oxide layer on an exposed surface of the semiconductor substrate. Then, an aluminum oxide material is deposited over the first and second silicon oxide layers including the undercut region and the gate dielectric layer. The aluminum oxide material is selectively etched to form an insert region in a portion of the undercut region. A sidewall spacer is formed to isolate and protect the exposed aluminum oxide material and the polysilicon gate structure.
Public/Granted literature
- US20110140190A1 METHOD FOR MANUFACTURING TWIN BIT STRUCTURE CELL WITH ALUMINUM OXIDE LAYER Public/Granted day:2011-06-16
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