Invention Grant
- Patent Title: Radiation hardened transistors based on graphene and carbon nanotubes
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Application No.: US13006081Application Date: 2011-01-13
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Publication No.: US08546246B2Publication Date: 2013-10-01
- Inventor: Yu-Ming Lin , Jeng-Bang Yau
- Applicant: Yu-Ming Lin , Jeng-Bang Yau
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Michael J. Chang, LLC
- Agent Vazken Alexanian
- Main IPC: H01L21/20
- IPC: H01L21/20

Abstract:
Graphene- and/or carbon nanotube-based radiation-hard transistor devices and techniques for the fabrication thereof are provided. In one aspect, a method of fabricating a radiation-hard transistor is provided. The method includes the following steps. A radiation-hard substrate is provided. A carbon-based material is formed on the substrate wherein a portion of the carbon-based material serves as a channel region of the transistor and other portions of the carbon-based material serve as source and drain regions of the transistor. Contacts are formed to the portions of the carbon-based material that serve as the source and drain regions of the transistor. A gate dielectric is deposited over the portion of the carbon-based material that serves as the channel region of the transistor. A top-gate contact is formed on the gate dielectric.
Public/Granted literature
- US20120181505A1 Radiation Hardened Transistors Based on Graphene and Carbon Nanotubes Public/Granted day:2012-07-19
Information query
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