Invention Grant
- Patent Title: Capacitive micromachined ultrasonic transducer comprising electrode on flexible membrane
- Patent Title (中): 电容式微机械超声换能器，包括柔性膜上的电极
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Application No.: US11316925Application Date: 2005-12-27
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Publication No.: US08546894B2Publication Date: 2013-10-01
- Inventor: Shuntaro Machida , Hiroshi Fukuda
- Applicant: Shuntaro Machida , Hiroshi Fukuda
- Applicant Address: JP Tokyo
- Assignee: Hitachi Ltd.
- Current Assignee: Hitachi Ltd.
- Current Assignee Address: JP Tokyo
- Agency: Stites & Harbison PLLC
- Agent Juan Carlos A. Marquez
- Priority: JP2005-019286 20050127
- Main IPC: H01L29/82
- IPC: H01L29/82
Abstract:
A technology capable of preventing the degradation of operation reliability of CMUT when a lower electrode for CMUTs arranged in an array is divided in order to control the CMUTs independently is provided. Also, a technology capable of preventing the formation of a convex or concave distortion in an insulating film (membrane) of the cavity is provided. For its achievement, a size of a lower electrode divided for independently controlling each CMUT is set to be larger than that of a cavity. Also, a size of an upper electrode of the CMUT is set to be larger than that of the cavity.
Public/Granted literature
- US20060179640A1 Ultrasonic transducer and method for manufacturing the same Public/Granted day:2006-08-17
Information query
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