An internal pulse waveform shaping circuit provided to an IC chip generates an internal pulse monitor signal that changes in a predetermined direction at a rise timing of an internal pulse signal during a period in which a first enable signal is asserted and a second enable signal is de-asserted and then continues in the changed state for a predetermined period of time or longer, and generates the internal pulse monitor signal that changes in the predetermined direction at a fall timing of the pulse signal during a period in which the first enable signal is de-asserted and the second enable signal is asserted and then continues in the changed state for the predetermined period of time or longer. The generated internal pulse monitor signal is output to a tester for detecting the pulse width of the internal pulse signal.