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US08547278B2 Sensing device having multi beam antenna array 有权
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Sensing device having multi beam antenna array
Abstract:
A sensing device may include an antenna. The antenna may include a top wafer and a bottom wafer coupled to the top wafer. The antenna may further include an air cavity between the top wafer and the bottom wafer. The sensing device may further include a substrate and an interposer disposed between the antenna and the substrate.
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