Invention Grant
- Patent Title: Photolithography systems and associated methods of selective die exposure
- Patent Title (中): 光刻系统和选择性模具曝光的相关方法
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Application No.: US12419744Application Date: 2009-04-07
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Publication No.: US08547526B2Publication Date: 2013-10-01
- Inventor: William A. Stanton , Gurtej S. Sandhu
- Applicant: William A. Stanton , Gurtej S. Sandhu
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Perkins Coie LLP
- Main IPC: G03B27/72
- IPC: G03B27/72

Abstract:
Several embodiments of photolithography systems and associated methods of selective die exposure are disclosed herein. In one embodiment, a method for exposing a microelectronic substrate in a photolithography system includes producing an illumination radiation from a radiation source and identifying a field on the microelectronic substrate to be exposed. The field is partitioned into a first region discrete from a second region. The method further includes inhibiting the illumination radiation to expose the first region while simultaneously exposing the second region to the illumination radiation.
Public/Granted literature
- US20100253929A1 PHOTOLITHOGRAPHY SYSTEMS AND ASSOCIATED METHODS OF SELECTIVE DIE EXPOSURE Public/Granted day:2010-10-07
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