Invention Grant
- Patent Title: Optical surface defect inspection apparatus and optical surface defect inspection method
- Patent Title (中): 光学表面缺陷检查装置和光学表面缺陷检查方法
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Application No.: US13213116Application Date: 2011-08-19
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Publication No.: US08547547B2Publication Date: 2013-10-01
- Inventor: Shintaro Tamura , Masanori Fukawa , Ayumu Ishihara , Kenichi Shitara , Hiroshi Nakajima
- Applicant: Shintaro Tamura , Masanori Fukawa , Ayumu Ishihara , Kenichi Shitara , Hiroshi Nakajima
- Applicant Address: JP Tokyo
- Assignee: Hitachi High-Technologies Corporation
- Current Assignee: Hitachi High-Technologies Corporation
- Current Assignee Address: JP Tokyo
- Agency: Antonelli, Terry, Stout & Kraus, LLP.
- Priority: JP2010-213731 20100924
- Main IPC: G01N21/00
- IPC: G01N21/00

Abstract:
The present invention is to provide an optical surface defect inspection apparatus or an optical surface defect inspection method that can improve a signal-to-noise ratio according to a multi-segmented cell method without performing autofocus operations, and can implement highly sensitive inspection. The present invention is an optical surface defect inspection apparatus or an optical surface defect inspection method in which an inspection beam is applied onto a test subject, an image of a scattered light from the surface of the test subject is formed on a photo-detector, and a defect on the surface of the test subject is inspected based on an output from the photo-detector. The photo-detector has an optical fiber bundle. One end thereof forms a circular light receiving surface to receive the scattered light. The other end thereof is connected to a plurality of light receiving devices. The optical fiber bundle is divided into a plurality of fan-shaped cells in the light receiving surface, and connected to the light emitting devices in units of the cells for performing the inspection based on the outputs of the plurality of cells.
Public/Granted literature
- US20120075625A1 OPTICAL SURFACE DEFECT INSPECTION APPARATUS AND OPTICAL SURFACE DEFECT INSPECTION METHOD Public/Granted day:2012-03-29
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