Invention Grant
- Patent Title: Apparatus for determining a height map of a surface through both interferometric and non-interferometric measurements
- Patent Title (中): 用于通过干涉测量和非干涉测量确定表面的高度图的装置
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Application No.: US12949150Application Date: 2010-11-18
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Publication No.: US08547557B2Publication Date: 2013-10-01
- Inventor: Maarten Jozef Jansen
- Applicant: Maarten Jozef Jansen
- Applicant Address: JP Kawasaki
- Assignee: Mitutoyo Corporation
- Current Assignee: Mitutoyo Corporation
- Current Assignee Address: JP Kawasaki
- Agency: Rankin, Hill & Clark LLP
- Priority: EP09176626 20091120
- Main IPC: G01B9/02
- IPC: G01B9/02 ; G01B11/02 ; G01B11/24 ; G01N21/00

Abstract:
The invention relates to an apparatus and a method for determining a height map of a surface of an object. The apparatus can include positioning means for the object, a light source, an optical detector for converting the received light into electrical signals, first optics for directing light from the light source to the surface and for directing the light from the surface to the optical detector, a beam splitter located between the first optics and the surface, a reference mirror, second optics located between the beam splitter an the mirror for directing the light from the beam splitter to the mirror and from the mirror to the beam splitter, scanning means, processing means that converts the signal from the optical detector into a height map. The beam splitter can be a polarizing beam splitter. A controllable polarization controller can be located between the light source and the first optics.
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