Invention Grant
- Patent Title: Electrical routing
- Patent Title (中): 电气路由
-
Application No.: US12946396Application Date: 2010-11-15
-
Publication No.: US08547627B2Publication Date: 2013-10-01
- Inventor: Ankur Jain , Roman C. Gutierrez
- Applicant: Ankur Jain , Roman C. Gutierrez
- Applicant Address: US CA Arcadia
- Assignee: DigitalOptics Corporation MEMS
- Current Assignee: DigitalOptics Corporation MEMS
- Current Assignee Address: US CA Arcadia
- Agency: Haynes and Boone LLP
- Main IPC: G02B26/00
- IPC: G02B26/00 ; G02B26/08

Abstract:
An electronic device may have a MEMS device formed of a first conductive material. A trench may be formed in the MEMS device. A layer of non-conductive material may be formed in the trench. A second conductive material may be formed upon the non-conductive material.
Public/Granted literature
- US20120119611A1 ELECTRICAL ROUTING Public/Granted day:2012-05-17
Information query