Invention Grant
US08548021B2 III-nitride semiconductor laser, and method for fabricating III-nitride semiconductor laser
有权
III族氮化物半导体激光器和III族氮化物半导体激光器的制造方法
- Patent Title: III-nitride semiconductor laser, and method for fabricating III-nitride semiconductor laser
- Patent Title (中): III族氮化物半导体激光器和III族氮化物半导体激光器的制造方法
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Application No.: US13211858Application Date: 2011-08-17
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Publication No.: US08548021B2Publication Date: 2013-10-01
- Inventor: Kei Fujii , Masaki Ueno , Katsushi Akita , Takashi Kyono , Yusuke Yoshizumi , Takamichi Sumitomo , Yohei Enya
- Applicant: Kei Fujii , Masaki Ueno , Katsushi Akita , Takashi Kyono , Yusuke Yoshizumi , Takamichi Sumitomo , Yohei Enya
- Applicant Address: JP Osaka-shi
- Assignee: Sumitomo Electric Industries, Ltd.
- Current Assignee: Sumitomo Electric Industries, Ltd.
- Current Assignee Address: JP Osaka-shi
- Agency: Venable LLP
- Agent Michael A. Sartori; Steven J. Schwarz
- Priority: JPP2009-034004 20090217
- Main IPC: H01S5/00
- IPC: H01S5/00

Abstract:
Provided is a III-nitride semiconductor laser allowing for provision of a low threshold with use of a semipolar plane. A primary surface 13a of a semiconductor substrate 13 is inclined at an angle of inclination AOFF in the range of not less than 50 degrees and not more than 70 degrees toward the a-axis direction of GaN with respect to a reference plane perpendicular to a reference axis Cx along the c-axis direction of GaN. A first cladding layer 15, an active layer 17, and a second cladding layer 19 are provided on the primary surface 13a of the semiconductor substrate 13. The well layers 23a of the active layer 17 comprise InGaN. A polarization degree P in the LED mode of emission from the active layer of the semiconductor laser that reaches lasing is not less than −1 and not more than 0.1. The polarization degree P of the III-nitride semiconductor laser is defined by P=(I1−I2)/(I1+I2), using an electric field component I1 in the X1 direction and an electric field component I2 in the X2 direction of light in the LED mode.
Public/Granted literature
- US20120008660A1 III-NITRIDE SEMICONDUCTOR LASER, AND METHOD FOR FABRICATING III-NITRIDE SEMICONDUCTOR LASER Public/Granted day:2012-01-12
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