Invention Grant
- Patent Title: X-ray analyzer
- Patent Title (中): X射线分析仪
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Application No.: US13403277Application Date: 2012-02-23
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Publication No.: US08548121B2Publication Date: 2013-10-01
- Inventor: Noriaki Sakai
- Applicant: Noriaki Sakai
- Applicant Address: JP Chiba
- Assignee: SII Nano Technology Inc.
- Current Assignee: SII Nano Technology Inc.
- Current Assignee Address: JP Chiba
- Agency: Brinks Hofer Gilson & Lione
- Priority: JP2011-052140 20110309
- Main IPC: G01N23/223
- IPC: G01N23/223

Abstract:
Provided is an X-ray analyzer that is capable of reducing measurement time necessary for mapping analysis by measuring only regions on a sample targeted by a measurer with minimal action. A superimposition process of a mapping image and image data of the sample is performed, and a position corresponding to an irradiation point is determined. Based on the result, the image is displayed, and measurement execution regions are designated on the displayed image and hence a sample moving mechanism moves at high speed in regions excluding the designated regions.
Public/Granted literature
- US20120230468A1 X-RAY ANALYZER Public/Granted day:2012-09-13
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