Invention Grant
- Patent Title: High efficiency high accuracy heater driver
- Patent Title (中): 高效率高精度加热器驱动
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Application No.: US12708648Application Date: 2010-02-19
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Publication No.: US08548312B2Publication Date: 2013-10-01
- Inventor: Alexander Goldin , Oleg V. Serebryanov
- Applicant: Alexander Goldin , Oleg V. Serebryanov
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Servilla Whitney LLC
- Main IPC: F26B3/30
- IPC: F26B3/30

Abstract:
A rapid thermal process chamber having a lamp driver circuit that includes two transistors and two diodes is described. The rapid thermal process chamber includes a plurality of halogen lamps, the lamp driver, a temperature sensor that measures wafer temperature, a temperature controller connected to the temperature sensor and to the lamp driver, the temperature controller providing control signals to the lamp driver that are functions of the wafer temperature and a desired temperature. The lamp driver includes two transistors that are controlled by the control signals so that the power factor of the power supplied to the plurality of halogen lamps is in the range of 0.9 to 1.
Public/Granted literature
- US20110206358A1 High Efficiency High Accuracy Heater Driver Public/Granted day:2011-08-25
Information query
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