Invention Grant
- Patent Title: Determining thin film stack functional relationships for measurement of chemical composition
- Patent Title (中): 确定化学成分测量薄膜叠层的功能关系
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Application No.: US13195063Application Date: 2011-08-01
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Publication No.: US08548748B2Publication Date: 2013-10-01
- Inventor: Carlos L. Ygartua
- Applicant: Carlos L. Ygartua
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tencor Corporation
- Current Assignee: KLA-Tencor Corporation
- Current Assignee Address: US CA Milpitas
- Agency: Luedeka Neely Group, P.C.
- Agent Rick Barnes
- Main IPC: G01N31/00
- IPC: G01N31/00
Abstract:
A method for determining chemical composition from optical properties of a stack formed with a process, by preparing test samples of the stack using known and intentional variations to the process to affect a variation in the chemical composition, measuring the optical properties of the test samples, measuring the chemical composition of the test samples, performing a processor-based regression analysis to determine an optical state function including correlations between the optical properties of the test samples and the chemical composition of the test samples, fabricating production samples of the stack using the process, measuring the optical properties of the production samples, and estimating the chemical composition of the production samples using the optical state function.
Public/Granted literature
- US20130035872A1 Determining Thin Film Stack Functional Relationships For Measurement of Chemical Composition Public/Granted day:2013-02-07
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