Invention Grant
- Patent Title: Angular velocity sensor
- Patent Title (中): 角速度传感器
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Application No.: US13093328Application Date: 2011-04-25
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Publication No.: US08549916B2Publication Date: 2013-10-08
- Inventor: Minekazu Sakai , Kenichi Ao
- Applicant: Minekazu Sakai , Kenichi Ao
- Applicant Address: JP Kariya
- Assignee: DENSO CORPORATION
- Current Assignee: DENSO CORPORATION
- Current Assignee Address: JP Kariya
- Agency: Posz Law Group, PLC
- Priority: JP2010-108605 20100510
- Main IPC: G01C19/56
- IPC: G01C19/56

Abstract:
In an angular velocity sensor, a beam portion couples a pair of vibrators with each other and couples each of the vibrators to a substrate to enable the pair of vibrators to be movable in a first direction and a second direction that are perpendicular to each other. The driving portion vibrates the pair of vibrators in opposite phases in the first direction. The detecting portion detects displacement of the pair of vibrators in the second direction as a change in capacitance. The detecting portion includes first and second detecting electrodes. The restricting portion restricts displacement of the pair of vibrators in the second direction based on the change in capacitance. The restricting portion includes first and second restricting electrodes, and an electrode interval between the restricting electrodes is twice a width of the detecting electrodes in the second direction.
Public/Granted literature
- US20110271758A1 ANGULAR VELOCITY SENSOR Public/Granted day:2011-11-10
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