Invention Grant
US08549922B2 Motion detection using capacitor having different work function materials
有权
运动检测使用电容器具有不同的功能材料
- Patent Title: Motion detection using capacitor having different work function materials
- Patent Title (中): 运动检测使用电容器具有不同的功能材料
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Application No.: US12720813Application Date: 2010-03-10
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Publication No.: US08549922B2Publication Date: 2013-10-08
- Inventor: Alexander Kalnitsky , Fu-Lung Hsueh
- Applicant: Alexander Kalnitsky , Fu-Lung Hsueh
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Duane Morris LLP
- Main IPC: G01P15/125
- IPC: G01P15/125

Abstract:
An apparatus for detecting mechanical displacement in a micro-electromechanical system includes a capacitor having first and second plates spaced from one another, the first and second plates having different work functions and being electrically connected with each other. The capacitor plates are movable with respect to one another such that a spacing between the plates changes in response to a force. A current through the capacitor represents a rate of change in the spacing between the plates at a given time.
Public/Granted literature
- US20110219876A1 MOTION DETECTION USING CAPACITOR HAVING DIFFERENT WORK FUNCTION MATERIALS Public/Granted day:2011-09-15
Information query
IPC分类: