Invention Grant
US08549922B2 Motion detection using capacitor having different work function materials 有权
运动检测使用电容器具有不同的功能材料

Motion detection using capacitor having different work function materials
Abstract:
An apparatus for detecting mechanical displacement in a micro-electromechanical system includes a capacitor having first and second plates spaced from one another, the first and second plates having different work functions and being electrically connected with each other. The capacitor plates are movable with respect to one another such that a spacing between the plates changes in response to a force. A current through the capacitor represents a rate of change in the spacing between the plates at a given time.
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