Invention Grant
US08550520B2 Method and apparatus for manipulating a substrate 失效
用于操纵衬底的方法和装置

Method and apparatus for manipulating a substrate
Abstract:
A device is disclosed for manipulating a substrate having an inside diameter (ID). The device includes a handle, a trigger that slides within the handle, an alignment shaft and a plurality of substrate supports having distal ends. A plurality of substrate support actuators are connected to the trigger. The trigger can move the plurality of substrate supports between a substrate engaging position and a substrate releasing position through selective engagement of the plurality of substrate supports by the plurality of substrate support actuators. In the substrate engaging position the distal ends of the substrate supports move radially outward to engage the ID of the substrate, enabling the device to hold the substrate without touching the substrate faces. Other embodiments are described and claimed.
Public/Granted literature
Information query
Patent Agency Ranking
0/0