Invention Grant
- Patent Title: Film cassette for gaseous vapor deposition
- Patent Title (中): 用于气相沉积的胶片盒
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Application No.: US12550743Application Date: 2009-08-31
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Publication No.: US08551249B2Publication Date: 2013-10-08
- Inventor: Peter Francis Carcia , Calixto Estrada , Richard Dale Kinard , Robert Scott McLean , Kirstin H. Shilkitus
- Applicant: Peter Francis Carcia , Calixto Estrada , Richard Dale Kinard , Robert Scott McLean , Kirstin H. Shilkitus
- Applicant Address: US DE Wilmington
- Assignee: E I du Pont de Nemours and Company
- Current Assignee: E I du Pont de Nemours and Company
- Current Assignee Address: US DE Wilmington
- Main IPC: C23C16/00
- IPC: C23C16/00

Abstract:
A cassette for supporting a film during a gaseous vapor deposition process includes a central shaft having first and second end plates. A rib on each end plate forms a spiral groove able to accept an edge of a film. Each rib has a cross sectional configuration having substantially linear major edges, a predetermined width dimension and a predetermined average thickness dimension, and a width-to-thickness aspect ratio of at least 2:1. The rib could be substantially rectangular with an optional flow spoiler at the free end or substantially wedge-shaped. The interspoke spacing between end plates is at least three hundred millimeters (300 mm) and is also greater than the width dimension of a film substrate at a gaseous deposition temperature. The width dimension of each rib is between about 0.5% to about 2.0% of the interspoke spacing.
Public/Granted literature
- US20110048327A1 FILM CASSETTE FOR GASEOUS VAPOR DEPOSITION Public/Granted day:2011-03-03
Information query
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