Invention Grant
- Patent Title: Method for fabricating semiconductor laser
- Patent Title (中): 制造半导体激光器的方法
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Application No.: US13597305Application Date: 2012-08-29
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Publication No.: US08551797B2Publication Date: 2013-10-08
- Inventor: Shinji Abe
- Applicant: Shinji Abe
- Applicant Address: JP Tokyo
- Assignee: Mitsubishi Electric Corporation
- Current Assignee: Mitsubishi Electric Corporation
- Current Assignee Address: JP Tokyo
- Agency: Leydig, Voit & Mayer, Ltd.
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
A method for fabricating a semiconductor laser includes: sequentially forming a cladding layer of a first conductivity type, an active layer, a cladding layer of a second conductivity type, and a contact layer of the second conductivity type on a semiconductor substrate; forming a promotion film which contacts the contact layer only in a window region proximate an end plane of the semiconductor laser and absorbs group-III atoms from the contact layer to promote generation of group-III vacancies; implanting ions into the contact layer in the window region to damage the contact layer in the window region; and after forming the promotion film and implanting the ions, heat treating so that the group-III vacancies are diffused and the active layer is disordered in the window region and forms a window structure.
Public/Granted literature
- US20130217157A1 METHOD FOR FABRICATING SEMICONDUCTOR LASER Public/Granted day:2013-08-22
Information query
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