Invention Grant
- Patent Title: Method of manufacturing electronic device and display
- Patent Title (中): 制造电子设备和显示器的方法
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Application No.: US12656471Application Date: 2010-02-01
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Publication No.: US08551818B2Publication Date: 2013-10-08
- Inventor: Masanobu Tanaka
- Applicant: Masanobu Tanaka
- Applicant Address: JP Tokyo
- Assignee: Sony Corporation
- Current Assignee: Sony Corporation
- Current Assignee Address: JP Tokyo
- Agency: Rader, Fishman & Grauer PLLC
- Priority: JP2009-068774 20090319
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
A method of manufacturing an electronic device includes the steps of: forming a sacrifice layer made of at least one of an alkali metal oxide and an alkali earth metal oxide in a part of a first substrate; forming a supporting layer covering the sacrifice layer; forming an electronic device on the sacrifice layer with the supporting layer in between; exposing at least a part of a side face of the sacrifice layer by removing a part of the supporting layer; forming a support body between the electronic device and the supporting layer, and a surface of the first substrate; removing the sacrifice layer; breaking the support body and transferring the electronic device onto a second substrate by bringing the electronic device into close contact with an adhesion layer provided on a surface of the second substrate; removing a fragment of the support body belonging to the electronic device; removing at least an exposed region in the adhesion layer not covered with the electronic device; and forming a fixing layer on a surface of the electronic device and the surface of the second substrate.
Public/Granted literature
- US20100237380A1 Method of manufacturing electronic device and display Public/Granted day:2010-09-23
Information query
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