Invention Grant
- Patent Title: Power semiconductor device
- Patent Title (中): 功率半导体器件
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Application No.: US12962079Application Date: 2010-12-07
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Publication No.: US08552428B2Publication Date: 2013-10-08
- Inventor: Shigeto Honda
- Applicant: Shigeto Honda
- Applicant Address: JP Tokyo
- Assignee: Mitsubishi Electric Corporation
- Current Assignee: Mitsubishi Electric Corporation
- Current Assignee Address: JP Tokyo
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2010-074916 20100329
- Main IPC: H01L23/58
- IPC: H01L23/58 ; H01L31/0256 ; H01L31/0312 ; H01L29/76 ; H01L29/94 ; H01L31/062 ; H01L31/113 ; H01L31/119

Abstract:
A power semiconductor device according to the present invention, which has a termination structure in which a field plate is provided on an insulating film filled in a recessed region formed in a semiconductor substrate and includes a plurality of unit cells connected in parallel, includes: a gate wiring region in which gate wiring electrically connected to each gate electrode of the plurality of unit cells is provided; and a gate pad region electrically connected to the gate wiring region, wherein the gate wiring region is disposed on the insulating film filled in a recessed region formed in the semiconductor substrate.
Public/Granted literature
- US20110233544A1 POWER SEMICONDUCTOR DEVICE Public/Granted day:2011-09-29
Information query
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