Invention Grant
- Patent Title: SOI trench DRAM structure with backside strap
- Patent Title (中): 具有背面带的SOI沟槽DRAM结构
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Application No.: US13568601Application Date: 2012-08-07
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Publication No.: US08552487B2Publication Date: 2013-10-08
- Inventor: Bruce B. Doris , Kangguo Cheng , Ali Khakifirooz , Pranita Kulkarni , Ghavam G. Shahidi
- Applicant: Bruce B. Doris , Kangguo Cheng , Ali Khakifirooz , Pranita Kulkarni , Ghavam G. Shahidi
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Harrington & Smith
- Agent Louis J. Percello
- Main IPC: H01L27/108
- IPC: H01L27/108

Abstract:
A semiconductor structure includes a SOI substrate having a top silicon layer overlying an insulation layer, which overlies a bottom silicon layer; a capacitor disposed at least partially in the insulation layer; a device disposed at least partially on the top silicon layer, which device is coupled to a doped portion of the top silicon layer; a backside strap of first epitaxially-deposited material, at least a first portion of the backside strap underlying the doped portion, the backside strap being coupled to the doped portion of the top silicon layer at a first end of the backside strap and to the capacitor at a second end of the backside strap; and second epitaxially-deposited material that at least partially overlies the doped portion of the top silicon layer, the second epitaxially-deposited material further at least partially overlying the first portion.
Public/Granted literature
- US20120299075A1 SOI Trench Dram Structure With Backside Strap Public/Granted day:2012-11-29
Information query
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