Invention Grant
US08552502B2 Structure and method to make replacement metal gate and contact metal
有权
用于替换金属栅极和接触金属的结构和方法
- Patent Title: Structure and method to make replacement metal gate and contact metal
- Patent Title (中): 用于替换金属栅极和接触金属的结构和方法
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Application No.: US13427963Application Date: 2012-03-23
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Publication No.: US08552502B2Publication Date: 2013-10-08
- Inventor: Zhengwen Li , Michael P. Chudzik , Unoh Kwon , Filippos Papadatos , Andrew H. Simon , Keith Kwong Hon Wong
- Applicant: Zhengwen Li , Michael P. Chudzik , Unoh Kwon , Filippos Papadatos , Andrew H. Simon , Keith Kwong Hon Wong
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Scully, Scott, Murphy & Presser, P.C.
- Agent H. Daniel Schnurmann
- Main IPC: H01L27/12
- IPC: H01L27/12

Abstract:
An electrical device is provided that in one embodiment includes a p-type semiconductor device having a first gate structure that includes a gate dielectric that is present on the semiconductor substrate, a p-type work function metal layer, a metal layer composed of titanium and aluminum, and a metal fill composed of aluminum. An n-type semiconductor device is also present on the semiconductor substrate that includes a second gate structure that includes a gate dielectric, a metal layer composed of titanium and aluminum, and a metal fill composed of aluminum. An interlevel dielectric is present over the semiconductor substrate. The interlevel dielectric includes interconnects to the source and drain regions of the p-type and n-type semiconductor devices. The interconnects are composed of a metal layer composed of titanium and aluminum, and a metal fill composed of aluminum. The present disclosure also provides a method of forming the aforementioned structure.
Public/Granted literature
- US20120187420A1 STRUCTURE AND METHOD TO MAKE REPLACEMENT METAL GATE AND CONTACT METAL Public/Granted day:2012-07-26
Information query
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