Invention Grant
US08552524B2 Semiconductor component with trench insulation and corresponding production method 有权
具有沟槽绝缘的半导体元件及相应的生产方法

  • Patent Title: Semiconductor component with trench insulation and corresponding production method
  • Patent Title (中): 具有沟槽绝缘的半导体元件及相应的生产方法
  • Application No.: US10523239
    Application Date: 2003-07-19
  • Publication No.: US08552524B2
    Publication Date: 2013-10-08
  • Inventor: Franz SchulerGeorg Tempel
  • Applicant: Franz SchulerGeorg Tempel
  • Applicant Address: DE Neubiberg
  • Assignee: Infineon Technologies AG
  • Current Assignee: Infineon Technologies AG
  • Current Assignee Address: DE Neubiberg
  • Priority: DE10233208 20020722
  • International Application: PCT/DE03/02435 WO 20030719
  • International Announcement: WO2004/017401 WO 20040226
  • Main IPC: H01L29/00
  • IPC: H01L29/00 H01L21/8238
Semiconductor component with trench insulation and corresponding production method
Abstract:
The invention relates to a semiconductor component with trench isolation and to an associated fabrication method, a trench isolation having a deep isolation trench with a covering insulation layer, a side wall insulation layer and an electrically conductive filling layer, which is electrically connected to a predetermined doping region of the semiconductor substrate in a bottom region of the trench. The use of a trench contact, which has a deep contact trench with a side wall insulation layer and an electrically conductive filling layer, which is likewise electrically connected to the predetermined doping region of the semiconductor substrate in a bottom region of the contact trench, makes it possible to improve the electrical shielding properties with a reduced area requirement.
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