Invention Grant
US08552524B2 Semiconductor component with trench insulation and corresponding production method
有权
具有沟槽绝缘的半导体元件及相应的生产方法
- Patent Title: Semiconductor component with trench insulation and corresponding production method
- Patent Title (中): 具有沟槽绝缘的半导体元件及相应的生产方法
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Application No.: US10523239Application Date: 2003-07-19
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Publication No.: US08552524B2Publication Date: 2013-10-08
- Inventor: Franz Schuler , Georg Tempel
- Applicant: Franz Schuler , Georg Tempel
- Applicant Address: DE Neubiberg
- Assignee: Infineon Technologies AG
- Current Assignee: Infineon Technologies AG
- Current Assignee Address: DE Neubiberg
- Priority: DE10233208 20020722
- International Application: PCT/DE03/02435 WO 20030719
- International Announcement: WO2004/017401 WO 20040226
- Main IPC: H01L29/00
- IPC: H01L29/00 ; H01L21/8238

Abstract:
The invention relates to a semiconductor component with trench isolation and to an associated fabrication method, a trench isolation having a deep isolation trench with a covering insulation layer, a side wall insulation layer and an electrically conductive filling layer, which is electrically connected to a predetermined doping region of the semiconductor substrate in a bottom region of the trench. The use of a trench contact, which has a deep contact trench with a side wall insulation layer and an electrically conductive filling layer, which is likewise electrically connected to the predetermined doping region of the semiconductor substrate in a bottom region of the contact trench, makes it possible to improve the electrical shielding properties with a reduced area requirement.
Public/Granted literature
- US20060102978A1 Semiconductor component with trench insulation and corresponding production method Public/Granted day:2006-05-18
Information query
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