Invention Grant
US08552525B2 Semiconductor structures and devices and methods of forming the same
有权
半导体结构及其形成方法及其形成方法
- Patent Title: Semiconductor structures and devices and methods of forming the same
- Patent Title (中): 半导体结构及其形成方法及其形成方法
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Application No.: US13175468Application Date: 2011-07-01
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Publication No.: US08552525B2Publication Date: 2013-10-08
- Inventor: David H. Wells , Gurtej S. Sandhu
- Applicant: David H. Wells , Gurtej S. Sandhu
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: TraskBritt
- Main IPC: H01L29/06
- IPC: H01L29/06 ; H01L21/764

Abstract:
Methods of forming semiconductor structures that include bodies of a semiconductor material disposed between rails of a dielectric material are disclosed. Such methods may include filling a plurality of trenches in a substrate with a dielectric material and removing portions of the substrate between the dielectric material to form a plurality of openings. In some embodiments, portions of the substrate may be undercut to form a continuous void underlying the bodies and the continuous void may be filled with a conductive material. In other embodiments, portions of the substrate exposed within the openings may be converted to a silicide material to form a conductive material under the bodies. For example, the conductive material may be used as a conductive line to electrically interconnect memory device components. Semiconductor structures and devices formed by such methods are also disclosed.
Public/Granted literature
- US20130001739A1 SEMICONDUCTOR STRUCTURES AND DEVICES AND METHODS OF FORMING THE SAME Public/Granted day:2013-01-03
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