Invention Grant
- Patent Title: Self aligned structures and design structure thereof
- Patent Title (中): 自对准结构及其设计结构
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Application No.: US13343287Application Date: 2012-01-04
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Publication No.: US08552532B2Publication Date: 2013-10-08
- Inventor: William F. Clark, Jr. , John J. Pekarik , Yun Shi , Yanli Zhang
- Applicant: William F. Clark, Jr. , John J. Pekarik , Yun Shi , Yanli Zhang
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Roberts Mlotkowski Safan & Cole, P.C.
- Agent Anthony Canale
- Main IPC: H01L29/1004
- IPC: H01L29/1004

Abstract:
Vertical bipolar junction structures, methods of manufacture and design structures. The method includes forming one or more sacrificial structures for a bipolar junction transistor (BJT) in a first region of a chip. The method includes forming a mask over the one or more sacrificial structures. The method further includes etching an opening in the mask, aligned with the one or more sacrificial structures. The method includes forming a trench through the opening and extending into diffusion regions below the one or more sacrificial structures. The method includes forming a base region of the BJT by depositing an epitaxial material in the trench, in contact with the diffusion regions. The method includes forming an emitter contact by depositing a second epitaxial material on the base region within the trench. The epitaxial material for the emitter region is of an opposite dopant type than the epitaxial material of the base region.
Public/Granted literature
- US20130168822A1 SELF ALIGNED STRUCTURES AND DESIGN STRUCTURE THEREOF Public/Granted day:2013-07-04
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