Invention Grant
- Patent Title: Semiconductor device and a method of manufacturing the same
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Application No.: US13613602Application Date: 2012-09-13
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Publication No.: US08552555B2Publication Date: 2013-10-08
- Inventor: Shinya Suzuki
- Applicant: Shinya Suzuki
- Applicant Address: JP Kawasaki-shi
- Assignee: Renesas Electronics Corporation
- Current Assignee: Renesas Electronics Corporation
- Current Assignee Address: JP Kawasaki-shi
- Agency: Miles & Stockbridge P.C.
- Priority: JP2007-292079 20071109
- Main IPC: H01L23/485
- IPC: H01L23/485 ; H01L23/528

Abstract:
A technique which improves the reliability in coupling between a bump electrode of a semiconductor chip and wiring of a mounting substrate, more particularly a technique which guarantees the flatness of a bump electrode even when wiring lies in a top wiring layer under the bump electrode, thereby improving the reliability in coupling between the bump electrode and the wiring formed on a glass substrate. Wiring, comprised of a power line or signal line, and a dummy pattern are formed in a top wiring layer beneath a non-overlap region of a bump electrode. The dummy pattern is located to fill the space between wirings to reduce irregularities caused by the wirings and space in the top wiring layer. A surface protection film formed to cover the top wiring layer is flattened by CMP.
Public/Granted literature
- US20130020701A1 SEMICONDUCTOR DEVICE AND A METHOD OF MANUFACTURING THE SAME Public/Granted day:2013-01-24
Information query
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