Invention Grant
- Patent Title: Method of measuring and evaluating mechanical outputs of piezoelectric actuators, controlling method of the same, and apparatus using those methods
- Patent Title (中): 压电致动器的机械输出的测量和评估方法,其控制方法以及使用这些方法的装置
-
Application No.: US13260180Application Date: 2010-03-31
-
Publication No.: US08552620B2Publication Date: 2013-10-08
- Inventor: Takeshi Yano , Kazuo Yakuwa , Akio Yano , Sze Keat Chee , Toshiro Higuchi
- Applicant: Takeshi Yano , Kazuo Yakuwa , Akio Yano , Sze Keat Chee , Toshiro Higuchi
- Applicant Address: JP Kawasaki
- Assignee: Mechano Transformer Corporation
- Current Assignee: Mechano Transformer Corporation
- Current Assignee Address: JP Kawasaki
- Agency: Smith Patent Office
- Priority: JP2009-084074 20090331
- International Application: PCT/JP2010/055800 WO 20100331
- International Announcement: WO2010/114000 WO 20101007
- Main IPC: H01L41/107
- IPC: H01L41/107

Abstract:
The present invention relates to a method of measuring and evaluating rigidity of a target object or mechanical output, such as force, displacement, and mechanical energy generated by a piezoelectric actuator and applied to the target object, according to only a measured value of electric quantity without use of a mechanical sensor, and a method of controlling the piezoelectric actuator, and a device using these methods.Steps of finding equivalent circuit constants of the piezoelectric actuator; applying a voltage to the piezoelectric actuator and measuring electrical quantity flowing into the piezoelectric actuator due to the applied voltage, or applying an electric charge to the piezoelectric actuator and measuring voltage applied to the piezoelectric actuator due to the applied electric charge; and measuring and evaluating one or more of force, displacement, or mechanical energy generated by the piezoelectric actuator and applied to a target object, or rigidity of a target object are included. While these values are measured and evaluated minutely, applied voltage and electrical quantity are adjusted and controlled.
Public/Granted literature
Information query
IPC分类: