Invention Grant
US08553205B2 Method for controlling the position of a movable object, a control system for controlling a positioning device, and a lithographic apparatus 有权
用于控制可移动物体的位置的方法,用于控制定位装置的控制系统和光刻设备

Method for controlling the position of a movable object, a control system for controlling a positioning device, and a lithographic apparatus
Abstract:
A control system controls a positioning device displaceable in at least one degree of freedom by a reluctance motor. A force sensing element and a controller adjust force applied by the motor responsive to a force sensing element configured to sense force applied by the motor. The controller receives a signal representing force applied by the motor from the force sensing element, obtain an acceleration trajectory plan associated with a velocity trajectory plan for the positioning device, obtain a force trajectory plan associated with the acceleration trajectory plan, compare the force applied with a required amount of force obtained from the force trajectory, and adjust the amount of force applied by the motor based on the comparison. Related methods are also presented.
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