Invention Grant
- Patent Title: Method for controlling the position of a movable object, a control system for controlling a positioning device, and a lithographic apparatus
- Patent Title (中): 用于控制可移动物体的位置的方法,用于控制定位装置的控制系统和光刻设备
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Application No.: US12822370Application Date: 2010-06-24
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Publication No.: US08553205B2Publication Date: 2013-10-08
- Inventor: Stephen Roux , Frederick Michael Carter , Ross Ian Mackenzie
- Applicant: Stephen Roux , Frederick Michael Carter , Ross Ian Mackenzie
- Applicant Address: NL Veldhoven
- Assignee: ASML Holdings N.V.
- Current Assignee: ASML Holdings N.V.
- Current Assignee Address: NL Veldhoven
- Agency: Sterne, Kessler, Goldstein & Fox P.L.L.C.
- Main IPC: G03B27/58
- IPC: G03B27/58

Abstract:
A control system controls a positioning device displaceable in at least one degree of freedom by a reluctance motor. A force sensing element and a controller adjust force applied by the motor responsive to a force sensing element configured to sense force applied by the motor. The controller receives a signal representing force applied by the motor from the force sensing element, obtain an acceleration trajectory plan associated with a velocity trajectory plan for the positioning device, obtain a force trajectory plan associated with the acceleration trajectory plan, compare the force applied with a required amount of force obtained from the force trajectory, and adjust the amount of force applied by the motor based on the comparison. Related methods are also presented.
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