Invention Grant
- Patent Title: Device for storing substrates
- Patent Title (中): 存储基板的装置
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Application No.: US11995136Application Date: 2006-07-06
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Publication No.: US08554358B2Publication Date: 2013-10-08
- Inventor: Erich Jäger , Christian Balg
- Applicant: Christian Balg , Doris Jäger
- Applicant Address: CH Tägerwilen
- Assignee: TEC-SEM AG
- Current Assignee: TEC-SEM AG
- Current Assignee Address: CH Tägerwilen
- Agency: McGlew and Tuttle, P.C.
- Priority: CH1150/05 20050709
- International Application: PCT/CH2006/000356 WO 20060706
- International Announcement: WO2007/006166 WO 20070118
- Main IPC: G06F7/00
- IPC: G06F7/00 ; G01N21/00 ; C01B13/00

Abstract:
The invention relates to a device for storing platelike substrates, particularly wafers or test wafers, like those, in particular, used for manufacturing electronic components. The aim of the invention is to make a reliable access to the substrates possible even when storage elements, which can be separated from one another, of the device are affected by manufacturing mistakes. For such a device that, for each substrate, has a number of storage elements, which follow one another in a direction of stacking and which can move relative to one another, in which the storage elements have a stacking area, which is provided for placing the respective storage element inside a stack of storage elements, compensating means are therefore provided in order to compensate for stacking errors in the direction of stacking.
Public/Granted literature
- US20100179681A1 DEVICE FOR STORING SUBSTRATES Public/Granted day:2010-07-15
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